Reference‐Free Combined X‐Ray Reflectometry−Grazing Incidence X‐Ray Fluorescence at the French Synchrotron SOLEIL

Chambre d'Analyse Spectrométrique en Transmission ou Réflexion (Analysis Chamber for or Reflection Spectrometry) (CASTOR) is a new instrument, operated at the SOLEIL synchrotron facility, dedicated to metrological characterization of thin films with thicknesses in nanometer range. The instrument can combine two X-ray techniques, namely, reflectivity (XRR) measurements fluorescence (XRF) acquisitions and especially total-reflection (TXRF)-related techniques such as grazing-incidence XRF (GIXRF). most often installed on hard branch Metrology beamline. Geometrical presented, reproducibility studied, reference-free GIXRF analysis described. Some representative examples are given illustrate capabilities setup combined procedure.